The RPMBlue-FS is a photoluminescence mapping tool that can be fitted with a robotic wafer handler if needed. This tool has a very flexible configuration with a full specification spectrometer that can cover wavelengths from the deep UV to 2 microns or more. With room to fit up to four laser excitation sources and two array detectors while handling wafer sizes from 2" to 6", this high-speed room temperature PL mapper can meet the needs of almost all compound semiconductor users.
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The RPMBlue-FS photoluminescence mapping tool from Nanometrics |
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| Science & Technology | Upload TimePublished on 9 Nov 2015 |
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